MARC details
| 000 -LEADER |
|---|
| fixed length control field |
04680cam a2200757Ma 4500 |
| 001 - CONTROL NUMBER |
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| control field |
ocm43475627 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
OCoLC |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20241010141656.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS |
|---|
| fixed length control field |
m d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr cn||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
000112s1991 dcua o 000 0 eng d |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
91066812 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
N$T |
| Language of cataloging |
eng |
| Description conventions |
pn |
| Transcribing agency |
N$T |
| Modifying agency |
OCL |
| -- |
OCLCQ |
| -- |
OCL |
| -- |
YDXCP |
| -- |
OCLCQ |
| -- |
COF |
| -- |
OCLCQ |
| -- |
COCUF |
| -- |
OCLCE |
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E7B |
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CUSER |
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DKDLA |
| -- |
ADU |
| -- |
IDEBK |
| -- |
CUS |
| -- |
VPI |
| -- |
FVL |
| -- |
OCLCQ |
| -- |
OCLCF |
| -- |
OCLCQ |
| -- |
NLGGC |
| -- |
OCLCQ |
| -- |
UV0 |
| -- |
OCLCQ |
| -- |
AZK |
| -- |
OCLCQ |
| -- |
LOA |
| -- |
MOR |
| -- |
PIFBR |
| -- |
OCLCQ |
| -- |
BUF |
| -- |
STF |
| -- |
WRM |
| -- |
VTS |
| -- |
NRAMU |
| -- |
EZ9 |
| -- |
INT |
| -- |
VT2 |
| -- |
OCLCQ |
| -- |
AU@ |
| -- |
WYU |
| -- |
UKCRE |
| -- |
OCLCO |
| -- |
OCLCQ |
| -- |
INARC |
| -- |
QGK |
| -- |
OCLCO |
| 019 ## - |
|---|
| -- |
133166726 |
| -- |
301331452 |
| -- |
326754879 |
| -- |
475452781 |
| -- |
614620430 |
| -- |
645824130 |
| -- |
666932774 |
| -- |
722249159 |
| -- |
728014561 |
| -- |
961670055 |
| -- |
961679911 |
| -- |
962592336 |
| -- |
962716419 |
| -- |
966199181 |
| -- |
988443441 |
| -- |
991988040 |
| -- |
1037915847 |
| -- |
1038701257 |
| -- |
1045497160 |
| -- |
1047525714 |
| -- |
1053023850 |
| -- |
1055334602 |
| -- |
1058093928 |
| -- |
1065043700 |
| -- |
1081244963 |
| -- |
1153481889 |
| -- |
1156362447 |
| -- |
1228603603 |
| -- |
1249251486 |
| -- |
1259204972 |
| -- |
1392329949 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0585084637 |
| Qualifying information |
(electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780585084633 |
| Qualifying information |
(electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Canceled/invalid ISBN |
0309045975 |
| Qualifying information |
(pbk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Canceled/invalid ISBN |
9780309045971 |
| Qualifying information |
(pbk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1280203366 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781280203367 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9786610203369 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
6610203369 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0309583756 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780309583756 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
14049 |
| -- |
(N$T) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)43475627 |
| Canceled/invalid control number |
(OCoLC)133166726 |
| -- |
(OCoLC)301331452 |
| -- |
(OCoLC)326754879 |
| -- |
(OCoLC)475452781 |
| -- |
(OCoLC)614620430 |
| -- |
(OCoLC)645824130 |
| -- |
(OCoLC)666932774 |
| -- |
(OCoLC)722249159 |
| -- |
(OCoLC)728014561 |
| -- |
(OCoLC)961670055 |
| -- |
(OCoLC)961679911 |
| -- |
(OCoLC)962592336 |
| -- |
(OCoLC)962716419 |
| -- |
(OCoLC)966199181 |
| -- |
(OCoLC)988443441 |
| -- |
(OCoLC)991988040 |
| -- |
(OCoLC)1037915847 |
| -- |
(OCoLC)1038701257 |
| -- |
(OCoLC)1045497160 |
| -- |
(OCoLC)1047525714 |
| -- |
(OCoLC)1053023850 |
| -- |
(OCoLC)1055334602 |
| -- |
(OCoLC)1058093928 |
| -- |
(OCoLC)1065043700 |
| -- |
(OCoLC)1081244963 |
| -- |
(OCoLC)1153481889 |
| -- |
(OCoLC)1156362447 |
| -- |
(OCoLC)1228603603 |
| -- |
(OCoLC)1249251486 |
| -- |
(OCoLC)1259204972 |
| -- |
(OCoLC)1392329949 |
| 042 ## - AUTHENTICATION CODE |
|---|
| Authentication code |
dlr |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TA2005 |
| Item number |
.N37 1991eb |
| 072 #7 - SUBJECT CATEGORY CODE |
|---|
| Subject category code |
TEC |
| Subject category code subdivision |
009070 |
| Source |
bisacsh |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.044 |
| Edition number |
20 |
| 049 ## - LOCAL HOLDINGS (OCLC) |
|---|
| Holding library |
MAIN |
| 110 2# - MAIN ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
National Research Council (U.S.). |
| Subordinate unit |
Panel on Plasma Processing of Materials. |
| 9 (RLIN) |
240264 |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Plasma processing of materials : |
| Remainder of title |
scientific opportunities and technological challenges / |
| Statement of responsibility, etc. |
Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
Washington, D.C. : |
| Name of publisher, distributor, etc. |
National Academy Press, |
| Date of publication, distribution, etc. |
1991. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
1 online resource (xii, 75 pages) : |
| Other physical details |
illustrations |
| 336 ## - CONTENT TYPE |
|---|
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
|---|
| Media type term |
computer |
| Media type code |
c |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
|---|
| Carrier type term |
online resource |
| Carrier type code |
cr |
| Source |
rdacarrier |
| 347 ## - DIGITAL FILE CHARACTERISTICS |
|---|
| File type |
data file |
| Source |
rda |
| 588 0# - SOURCE OF DESCRIPTION NOTE |
|---|
| Source of description note |
Print version record. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE |
|---|
| Materials specified |
Use copy |
| Standardized terminology for access restriction |
Restrictions unspecified |
| Source of term |
star |
| Institution to which field applies |
MiAaHDL |
| 533 ## - REPRODUCTION NOTE |
|---|
| Type of reproduction |
Electronic reproduction. |
| Place of reproduction |
[S.l.] : |
| Agency responsible for reproduction |
HathiTrust Digital Library, |
| Date of reproduction |
2010. |
| Institution to which field applies |
MiAaHDL |
| 538 ## - SYSTEM DETAILS NOTE |
|---|
| System details note |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Uniform Resource Identifier |
<a href="http://purl.oclc.org/DLF/benchrepro0212">http://purl.oclc.org/DLF/benchrepro0212</a> |
| Institution to which field applies |
MiAaHDL |
| 583 1# - ACTION NOTE |
|---|
| Action |
digitized |
| Time/date of action |
2010 |
| Jurisdiction |
HathiTrust Digital Library |
| Status |
committed to preserve |
| Source of term |
pda |
| Institution to which field applies |
MiAaHDL |
| 546 ## - LANGUAGE NOTE |
|---|
| Language note |
English. |
| 590 ## - LOCAL NOTE (RLIN) |
|---|
| Local note |
Added to collection customer.56279.3 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Plasma engineering. |
| 9 (RLIN) |
153330 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectronics |
| General subdivision |
Materials |
| -- |
Effect of radiation on. |
| 9 (RLIN) |
240265 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Surfaces (Technology) |
| 9 (RLIN) |
105837 |
| 650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Technique des plasmas. |
| 9 (RLIN) |
189542 |
| 650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microélectronique |
| General subdivision |
Matériaux |
| -- |
Effets du rayonnement sur. |
| 9 (RLIN) |
1078894 |
| 650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Surfaces (Technologie) |
| 9 (RLIN) |
96971 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
TECHNOLOGY & ENGINEERING |
| General subdivision |
Mechanical. |
| Source of heading or term |
bisacsh |
| 9 (RLIN) |
14450 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectronics |
| General subdivision |
Materials |
| -- |
Effect of radiation on |
| Source of heading or term |
fast |
| 9 (RLIN) |
240265 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Plasma engineering |
| Source of heading or term |
fast |
| 9 (RLIN) |
153330 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Surfaces (Technology) |
| Source of heading or term |
fast |
| 9 (RLIN) |
105837 |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Relationship information |
Print version: |
| Main entry heading |
National Research Council (U.S.). Panel on Plasma Processing of Materials. |
| Title |
Plasma processing of materials. |
| Place, publisher, and date of publication |
Washington, D.C. : National Academy Press, 1991 |
| International Standard Book Number |
0309045975 |
| Record control number |
(DLC) 91066812 |
| -- |
(OCoLC)24832731 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
EBSCOhost |
| Uniform Resource Identifier |
<a href="https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14049">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14049</a> |
| 938 ## - |
|---|
| -- |
ebrary |
| -- |
EBRY |
| -- |
ebr10055392 |
| 938 ## - |
|---|
| -- |
EBSCOhost |
| -- |
EBSC |
| -- |
14049 |
| 938 ## - |
|---|
| -- |
ProQuest MyiLibrary Digital eBook Collection |
| -- |
IDEB |
| -- |
20336 |
| 938 ## - |
|---|
| -- |
YBP Library Services |
| -- |
YANK |
| -- |
2305353 |
| 938 ## - |
|---|
| -- |
YBP Library Services |
| -- |
YANK |
| -- |
6012565 |
| 938 ## - |
|---|
| -- |
Internet Archive |
| -- |
INAR |
| -- |
plasmaprocessing0000nati |
| 994 ## - |
|---|
| -- |
92 |
| -- |
N$T |