Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 240265

003 - CONTROL NUMBER IDENTIFIER

• control field: AT-ISTA

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20210119151218.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 210119|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: AT-ISTA
• Transcribing agency: AT-ISTA

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Microelectronics
• General subdivision: Materials
• General subdivision: Effect of radiation on

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (AT-ISTA): National Research Council (U.S.). Panel on Plasma Processing of Materials. 240264, Plasma processing of materials :, 1991.