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Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.
Material type:
TextSeries: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 195.Publisher: Durnten-Zurich, Switzerland : Trans Tech Publications Ltd., [2013]Copyright date: ©2013Description: 1 online resource (328 pages) : illustrations (black and white)Content type: - text
- computer
- online resource
- 9783038139089 (electronic bk.)
- 3038139084 (electronic bk.)
- 9781628700268 (electronic bk.)
- 1628700262 (electronic bk.)
- UCPSS 2012 [Other title]
- 537.622 23
- QC611.6.S9 I68 2013eb
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds | |
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eBook
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e-Library | EBSCO Technology | Available |
Total holds: 0
Includes bibliographical references and index.
Description based on online resource; title from PDF title page (ebrary, viewed November 1, 2013).