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Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / edited by Martin Feldman.
Material type:
TextSeries: Woodhead Publishing series in electronic and optical materials ; no. 42.Publisher: Philadelphia, PA : Woodhead Pub., 2014Description: 1 online resource (599 pages) : illustrationsContent type: - text
- computer
- online resource
- 9780857098757 (electronic bk.)
- 0857098756 (electronic bk.)
- 621.381531 23
- TK7872.M3 N36 2014eb
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|---|
eBook
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e-Library | EBSCO Technology | Available |
Total holds: 0
Includes bibliographical references and index.
Description based on print version record.