Ultra Clean Processing of Semiconductor Surfaces XIII.

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Material type: Text

TextSeries: Solid State Phenomena Vol. 255Publication details: Zurich : Trans Tech Publications, 2016.Description: 1 online resource (395 pages)Content type:

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Additional physical formats: Print version:: Ultra Clean Processing of Semiconductor Surfaces XIII.DDC classification:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
eBook	e-Library	EBSCO Technology		Available

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Print version record.

Includes bibliographical references at the end of each chapters and index.

Master record variable field(s) change: 050, 072, 650 - OCLC control number change