TY  - BOOK
AU  - Bruno,Giovanni
AU  - Capezzuto,Pio
AU  - Madan,A.
ED  - NetLibrary, Inc.
TI  - Plasma deposition of amorphous silicon-based materials
SN  - 9780080539102 (electronic bk.)
AV  - TK7871.99.A45 P55 1995eb
U1  - 621.3815/2 22
PY  - 1995///
CY  - Boston
PB  - Academic Press
KW  - Amorphous semiconductors
KW  - Design and construction
KW  - Silicon alloys
KW  - Plasma-enhanced chemical vapor deposition
KW  - Semiconductors
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Boulder, Colo.; NetLibrary; 2007; Available via World Wide Web; Access may be limited to NetLibrary affiliated libraries
UR  - https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=207143
ER  -