TY  - BOOK
AU  - Murphy,J.D.
ED  - Gettering and Defect Engineering in Semiconductor Technology Conference
TI  - Gettering and defect engineering in semiconductor technology XV: selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference , September 22-27, 2013, Oxford, UK 
T2  - Diffusion and defect data. Pt. B, Solid state phenomena,
SN  - 3038262056 (electronic bk.)
AV  - TK7871.85 .G426 2013
U1  - 621.3815/2 23
PY  - 2014///]
CY  - Durnten-Zurich
PB  - Trans Tech publications Ltd
KW  - Semiconductors
KW  - Defects
KW  - Congresses
KW  - Getters
KW  - TECHNOLOGY & ENGINEERING / Mechanical
KW  - bisacsh
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=663767
ER  -