Gettering and defect engineering in semiconductor technology XV [electronic resource] : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference , September 22-27, 2013, Oxford, UK / edited by J. D. Murphy.

By:

(15th : Gettering and Defect Engineering in Semiconductor Technology Conference (15th : 2013 : Oxford, UK)

Contributor(s):

Murphy, J. D [editor of compilation.]

Material type: Text

TextSeries: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 205/206.Publisher: Durnten-Zurich : Trans Tech publications Ltd, [2014]Description: 1 online resource (xiv, 516 pages) illustrations (black and whiteContent type:

text

Media type:

computer

Carrier type:

online resource

ISBN:

3038262056 (electronic bk.)
9783038262053 (electronic bk.)

Other title:

Gettering and defect engineering in semiconductor technology 15

Subject(s):

Genre/Form:

Electronic books.

Additional physical formats: Print version:: No titleDDC classification:

621.3815/2 23

LOC classification:

TK7871.85 .G426 2013

Online resources:

EBSCOhost

Holdings ( 1 )
Title notes ( 2 )

Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
eBook	e-Library	EBSCO Technology		Available

Total holds: 0

Includes bibliographical references and index.

Description based on print version record.