Plasma deposition of amorphous silicon-based materials [electronic resource] / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.

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Material type: Text

TextSeries: Plasma--materials interactionsPublication details: Boston : Academic Press, c1995.Description: xi, 324 p. : ill. ; 24 cmISBN:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
eBook	e-Library	EBSCO Science		Available

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Includes bibliographical references and index.

Electronic reproduction. Boulder, Colo. : NetLibrary, 2007. Available via World Wide Web. Access may be limited to NetLibrary affiliated libraries.