Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Material type:
TextPublication details: Washington, D.C. : National Academy Press, 1992.Description: 1 online resource (xii, 89 pages) : illustrationsContent type: - text
- computer
- online resource
- 0585149453
- 9780585149455
- Microelectronics industry
- Molecular beams -- Industrial applications
- Microelectronics -- Materials
- Plasma-enhanced chemical vapor deposition -- Industrial applications
- Microélectronique -- Industrie
- Faisceaux moléculaires -- Applications industrielles
- Microélectronique -- Matériaux
- Dépôt chimique en phase vapeur activé par plasma -- Applications industrielles
- TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics
- TECHNOLOGY & ENGINEERING -- Electronics -- Digital
- Microelectronics industry
- Microelectronics -- Materials
- Molecular beams -- Industrial applications
- Plasma-enhanced chemical vapor deposition -- Industrial applications
- Microelectronics Materials
- Microelectronics industry
- Molecular Industrial applications
- Plasma-enhanced Industrial applications
- 621.381 20
- TK7836 .N37 1992eb
- digitized 2010 HathiTrust Digital Library committed to preserve
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|---|
eBook
|
e-Library | EBSCO Technology | Available |
"NMAB-461."
Includes bibliographical references.
Print version record.
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Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. MiAaHDL
http://purl.oclc.org/DLF/benchrepro0212
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Added to collection customer.56279.3