Silicon science and advanced micro-device engineering II [electronic resource] : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.

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Material type: Text

TextSeries: Key engineering materials ; v. 497.Publication details: Durnten-Zurich : Trans Tech Publications, 2012.Description: 1 online resource (311 p. :) ill. (some col.)ISBN:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
eBook	e-Library	EBSCO Technology		Available

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Includes bibliographical references and indexes.

Description based on print version record.