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Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.
Material type:
TextSeries: Key engineering materials ; v. 459.Publication details: Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.Description: 1 online resource (xii, 282 p. :) illISBN: - 9783038134817 (electronic bk.)
- 3038134813 (electronic bk.)
- 5th International Symposium on Silicon Science
- Fifth International Symposium on Silicon Science
- International Symposium on Silicon Science
- 1st International Conference on Advanced Micro-Device Engineering
- First International Conference on Advanced Micro-Device Engineering
- International Conference on Advanced Micro-Device Engineering
- ISSS & AMDE 2009
- ISSS 2009 [Other title]
- AMDE 2009
- 621.381 23
- TK7871.15.S55 I585 2009eb
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eBook
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e-Library | EBSCO Technology | Available |
Total holds: 0
Includes bibliographical references and indexes.