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	1.	Plasma deposition of amorphous silicon-based materials [electronic resource] / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan. by Bruno, Giovanni Capezzuto, Pio Madan, A. (Arun) NetLibrary, Inc Series: Plasma--materials interactions Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Boston : Academic Press, c1995 Online resources: EBSCOhost Availability: Items available for loan: e-Library (1). Place hold
	2.	Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. by National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems Material type: Text; Format: available online ; Literary form: Not fiction Publication details: Washington, D.C. : National Academy Press, 1992 Online resources: EBSCOhost Availability: Items available for loan: e-Library (1). Place hold

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