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Advances in chemical mechanical planarization (CMP) /

Advances in chemical mechanical planarization (CMP) / edited by Suryadevara Babu. - 1 online resource. - Woodhead publishing series in electronic and optical materials ; number 86 . - Woodhead Publishing series in electronic and optical materials ; number 86. .

Includes bibliographical references and index.

ISBN: 9780081002186 0081002181

Subjects--Topical Terms:
Chemical mechanical planarization.
Nanoelectronics.
Microelectronics.
TECHNOLOGY & ENGINEERING / Mechanical

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7874.84

Dewey Class. No.: 621.381

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