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Advances in chemical mechanical planarization (CMP) / edited by Suryadevara Babu.
Material type:
TextSeries: Woodhead Publishing series in electronic and optical materials ; number 86.Publisher: Waltham, MA : Woodhead Publishing, [2016]Copyright date: ©2016Description: 1 online resourceContent type: - text
- computer
- online resource
- 9780081002186
- 0081002181
- 621.381 23
- TK7874.84
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|---|
eBook
|
e-Library | EBSCO Technology | Available |
Total holds: 0
Online resource; title from PDF title page (EBSCO, viewed January 14, 2016)
Includes bibliographical references and index.