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Gettering and defect engineering in semiconductor technology XIII GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Dölnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009 /

Gettering and defect engineering in semiconductor technology XIII GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Dölnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009 / [electronic resource] : GADEST 2009 edited by M. Kittler and H. Richter. - Stafa-Zuerich, Switzerland : Trans Tech Publications, c2010. - 1 online resource (xiv, 592 p.) : ill. - Solid state phenomena, v. 156-158 1012-0394 ; . - Diffusion and defect data. Pt. B, Solid state phenomena ; v. 156/158. .

Includes bibliographical references and index.

ISBN: 9783038133698 (electronic bk.) 3038133698 (electronic bk.)

Subjects--Topical Terms:
Semiconductors--Congresses.
Solid state electronics--Congresses.
TECHNOLOGY & ENGINEERING / Engineering (General)
TECHNOLOGY & ENGINEERING / Reference

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: QD543 / .S64x v. 156/158eb

Dewey Class. No.: 620.38152