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Gettering and defect engineering in semiconductor technology XIII [electronic resource] : GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Dölnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009 / edited by M. Kittler and H. Richter.
Material type:
TextSeries: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 156/158.Publication details: Stafa-Zuerich, Switzerland : Trans Tech Publications, c2010.Description: 1 online resource (xiv, 592 p.) : illISBN: - 9783038133698 (electronic bk.)
- 3038133698 (electronic bk.)
- GADEST 2009
- 620.38152 22
- QD543 .S64x v. 156/158eb
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eBook
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e-Library | EBSCO Technology | Available |
Total holds: 0
Includes bibliographical references and index.
Description based on print version record.