Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Material type:
TextPublication details: Washington, D.C. : National Academy Press, 1991.Description: 1 online resource (xii, 75 pages) : illustrationsContent type: - text
- computer
- online resource
- 0585084637
- 9780585084633
- 1280203366
- 9781280203367
- 9786610203369
- 6610203369
- 0309583756
- 9780309583756
- Plasma engineering
- Microelectronics -- Materials -- Effect of radiation on
- Surfaces (Technology)
- Technique des plasmas
- Microélectronique -- Matériaux -- Effets du rayonnement sur
- Surfaces (Technologie)
- TECHNOLOGY & ENGINEERING -- Mechanical
- Microelectronics -- Materials -- Effect of radiation on
- Plasma engineering
- Surfaces (Technology)
- 621.044 20
- TA2005 .N37 1991eb
- digitized 2010 HathiTrust Digital Library committed to preserve
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|---|
eBook
|
e-Library | EBSCO Technology | Available |
Print version record.
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Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. MiAaHDL
http://purl.oclc.org/DLF/benchrepro0212
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
English.
Added to collection customer.56279.3